Read e-book online A Practical Guide to Optical Metrology for Thin Films PDF

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By Michael Quinten

A one-stop, concise consultant on opting for and measuring skinny movie thickness by way of optical methods.

This sensible publication covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the idea and perform of thickness dimension, and smooth functions. In so doing, it indicates the features and possibilities of optical thickness choice and discusses the strengths and weaknesses of size units besides their evaluate methods.

Following an creation to the subject, bankruptcy 2 offers the fundamentals of the propagation of sunshine and different electromagnetic radiation in house and topic. the most subject of this ebook, the decision of the thickness of a layer in a layer stack by way of measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. eventually, in bankruptcy 7, the writer discusses a number of commercial functions of the layer thickness size, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at commercial and educational researchers, engineers, builders and brands inquisitive about all parts of optical layer and skinny optical movie size and metrology, technique regulate, real-time tracking, and applications.

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A Practical Guide to Optical Metrology for Thin Films by Michael Quinten


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